Chemical Vapor Deposition

1. A. Banerjee and T. DebRoy, Effect of Pressure on Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide(s), Journal of the American Ceramic Society, 1994, vol. 77(5), pp. 1366-1368 (pdf).

2. T. DebRoy, S. Kumar, and K. Tankala, Optical Emission During Deposition of Diamond Like Carbon Films by Plasma Assisted Chemical Vapor Deposition, Diamond and Related Materials, 1994, vol. 4, pp. 69-75 (pdf).

3. K. Tankala and T. DebRoy, Transport Phenomena in the Scale-up of Hot Filament Assisted Chemical Vapor Deposition of Diamond, Surface and Coatings Technology, 1993, vol. 62, pp. 349-355 (pdf).

4. K. Tankala and T. DebRoy, Modeling of the Role of Atomic Hydrogen in Heat Transfer during Hot Filament Assisted Deposition of Diamond, Journal of Applied Physics, 1992, vol. 72(2), pp. 712-718 (pdf).

5. Y. A. Yarbrough, K. Tankala, and T. DebRoy, Diamond Growth with Locally Supplied Methane and Acetylene, Journal of Materials Research, 1992, vol. 7(2), pp. 379-383 (pdf).

6. K. Tankala, T. DebRoy, W. A. Yarbrough, and C. J. Robinson, Modeling of the Substrate Surface Temperature Distribution during Hot Filament Assisted Deposition of Diamond, Diamond and Related Materials, 1992, vol. 1, pp. 1177-1184 (pdf).

7. Y. A. Yarbrough, K. Tankala, M. Macray, and T. DebRoy, Hydrogen Assisted Heat Transfer during Diamond Growth using Carbon and Tantalum Filaments, Applied Physics Letters, 1992, vol. 60(17), pp. 2068-2070 (pdf).

8. A. Banerjee and T. DebRoy, Optical Emission Investigation of the Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide Films, Journal of Vacuum Science and Technology, 1992, vol. 10(6), pp. 3395-3400 (pdf).

9. K. Tankala, T. DebRoy, and M. Alam, Oxidation of Diamond Films Synthesized by Hot Filament Assisted Chemical Vapor Deposition, Journal of Materials Research, 1990, vol. 5(11), pp. 2483-2489 (pdf).

10. T. DebRoy, K. Tankala, W. Yarbrough, and R. Messier, Role of Heat Transfer and Fluid Flow in the Chemical Vapor Deposition of Diamond, Journal of Applied Physics, 1990, vol. 68(5), pp. 2424-2432 (pdf).