Jerzy Ruzyllo
Jerzy Ruzyllo
Distinguished Professor of Electrical Engineering and Professor of Materials Science and Engineering
The Pennsylvania State University
214 Electrical Engineering West
University Park, PA 16802
814-865-5193
jruzyllo@.psu.edu
Semiconductor electronics and photonics:
- Manufacturing methods
- Surface processing
- Surface and material characterization
- Novel thin film deposition techniques
- Large-area semiconductor structures.
- Wu, C.-T., A. Mieckowski, R.S. Ridley, G. Dolny, T. Grebs, J. Linn, and J. Ruzyllo, “Effect of Nitridation on the Reliability of Thick Gate Oxides”, Microelectronic Reliability, 43, 43 (2003).
- Tsai, C.-L., P. Roman, C.-T. Wu, C. Pantano, J. Berry, E. Kamieniecki and J. Ruzyllo, “Control of Organic Contamination on Silicon Surface Using White Light Illumination”, Journal of the Electrochemical Society, 150, G39 (2003).
- Chang, K., K. Shanmugasundaram, D.O. Lee, P. Roman, C.-T. Wu, J. Wang, J. Shallenberger, P. Mumbauer, R. Grant, R. Ridley, G. Dolny , and J. Ruzyllo, “Silicon Surface Treatments in Advanced MOS Gate Processing”, Microelectronic Engineering, 72, 130 (2004).
- Le Roux, V., G. Machicoane, S.Kerdiles, R. Laffitte, N Bechu , L. Vallier, G. Borsoni, M. L. Korwin-Pawlowski, P. Roman, C.-T. Wu and J. Ruzyllo, " Etching of Silicon Native Oxide Using Ultra-Slow Multicharged Arq+ Ions", Journal of the Electrochemical Society, 151, G76 (2004).
- Mumbauer, P., K. Chang, W. Mahoney, D.-O. Lee, P. K. Shanmugasundaram, P. Roman, M. Brubaker, R. Grant, and J. Ruzyllo, “Mist Deposition in Semiconductor Device Manufacturing”, Semiconductor International, 27, 12, 75 (2004).
Appointment Policies and Procedures
Courtesy Faculty
David Saint John, a 2012 MatSC grad and instructor in Penn State's College of...
Donald W. Hamer, a 1968 Penn State alumnus and 2013 recipient of the Materials Sci...
Neal Lewis, a junior performing undergraduate research in Professor Clive Randall...
The 40th Taylor Lecture was given on April 23, 2013, by P.M. Ajayan, the Benjamin...
Beecher Watson III, undergraduate student advised by Dr. Douglas Wolfe won the...
Dr. Michael Hickner receive...
We would like to thank all who attended the awards banquet and congratulations to...
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Michael Schmitt, a graduate student working with...